Abstract
From low energy electron microscopy observations of the surface topography of Si(001) during homoepitaxial growth at 650 °C, we have determined the nucleation density profile on top of a “base” island, and the distribution of the base island radius at the time of nucleation. Comparison with homogeneous nucleation theory yields a typical critical nucleus size of dimers, and allows nucleation on Si(001) to be understood in a common framework with equilibrium step-edge fluctuations and 2D island ripening.
- Received 23 October 1995
DOI:https://doi.org/10.1103/PhysRevLett.76.2770
©1996 American Physical Society