Abstract
We show that a recently proposed pressure model of collisionless heating in capacitive rf discharges predicts that a small magnetic field ( ) applied transverse to the electric field will induce a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state. This prediction is confirmed by kinetic simulations and experiments.
- Received 30 November 1995
DOI:https://doi.org/10.1103/PhysRevLett.76.2069
©1996 American Physical Society