Abstract
The relaxation of the electron energy distribution function (EEDF) in the post-discharge of an microwave discharge in has been investigated by solving the time-dependent Boltzmann equation, including a term taking into account electron losses by diffusion under the presence of a space-charge field. It is shown that although the high-energy tail of the EEDF is rapidly depleted in times of and 10 Torr), the electron density the electron transport parameters, and the rate coefficients for some processes induced by electron impact, with energy thresholds typically smaller than ∼2–3 eV, such as, e.g., stepwise excitation of and states from metastables and excitation of levels, are only slowly modified in the time interval due to the large characteristic times for ambipolar diffusion. As a result of modifications in the change from ambipolar to free diffusion regimes occurs abruptly at and for and 10 Torr, respectively.
- Received 16 October 2000
DOI:https://doi.org/10.1103/PhysRevE.63.046404
©2001 American Physical Society