• Open Access

Charge measurement of SiO2 nanoparticles in an rf plasma by ir absorption

Harald Krüger, Elena Thiessen, Franz Xaver Bronold, Holger Fehske, and André Melzer
Phys. Rev. E 104, 045208 – Published 21 October 2021

Abstract

We have performed measurements of the ir absorption of SiO2 nanoparticles confined in an argon radiofrequency plasma discharge using a Fourier transform infrared spectrometer. By varying the gas pressure of the discharge and duty cycle of the applied radiofrequency voltage, we observed a shift of the absorption peak of SiO2. We attributed this shift to charge-dependent absorption features of SiO2. The charge-dependent shift has been calculated for SiO2 particles, and from comparisons with the experiment the particle charge has been retrieved using our infrared phonon resonance shift method. With the two different approaches of changing the gas pressure and altering the duty cycle, we are able to deduce a relative change of the particle charge with pressure variations and an absolute estimate of the charge with the duty cycle.

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  • Received 30 June 2021
  • Accepted 24 September 2021

DOI:https://doi.org/10.1103/PhysRevE.104.045208

Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.

Published by the American Physical Society

Physics Subject Headings (PhySH)

  1. Physical Systems
Plasma Physics

Authors & Affiliations

Harald Krüger*, Elena Thiessen, Franz Xaver Bronold, Holger Fehske, and André Melzer

  • Institute of Physics, University of Greifswald, Felix-Hausdorff-Strasse 6, 17489 Greifswald, Germany

  • *harald.krueger@physik.uni-greifswald.de

Article Text

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Issue

Vol. 104, Iss. 4 — October 2021

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