Abstract
The effects of oblique incidence on the surface roughness in low-temperature epitaxial growth are investigated via kinetic Monte Carlo simulations, which include the effects of shadowing as well as short-range and long-range attraction. While the effects of deposition angle are found to be relatively weak at , at a slightly lower temperature both the surface roughness and the growth exponent depend strongly on deposition angle. These results resolve a long-standing puzzle regarding the growth behavior of over this temperature range. Our results also demonstrate that, in general, the effects of deposition angle must be considered in low-temperature growth even for moderate deposition angles.
- Received 7 September 2007
DOI:https://doi.org/10.1103/PhysRevB.76.241401
©2007 American Physical Society