Abstract
Amorphous multilayers grown by magnetron sputtering have been studied using x-ray reflectometry, x-ray diffraction, Rutherford backscattering spectrometry, and transmission electron microscopy. It could be demonstrated that on the interface between the and the , crystalline grains are formed, that for very small repetition thicknesses destroy the periodicity of the multilayers by accumulative roughness. Understanding these effects would enable substantial improvement of the quality of nanolaminated amorphous layers.
1 More- Received 26 January 2007
DOI:https://doi.org/10.1103/PhysRevB.75.214202
©2007 American Physical Society