Surface stress effects on the resonance properties of cantilever sensors

Pin Lu, H. P. Lee, C. Lu, and S. J. O’Shea
Phys. Rev. B 72, 085405 – Published 1 August 2005

Abstract

The effect of surface stress on the resonance frequency of a cantilever sensor is modeled analytically by incorporating strain-dependent surface stress terms into the equations of motion. This mechanistic approach can be equated with a corresponding thermodynamic description, allowing basic equations to be derived that link the analysis to experimentally determined parameters. Examples are shown for the cases of a pure surface stress and an adsorption-induced surface stress, and indicate that frequency measurements may be useful for fundamental understanding of surface and adsorption-induced stresses on metals, semiconductors, and nanoscale structures. Application to biomolecular adsorption sensors appears unlikely.

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  • Received 16 March 2005

DOI:https://doi.org/10.1103/PhysRevB.72.085405

©2005 American Physical Society

Authors & Affiliations

Pin Lu1, H. P. Lee1, C. Lu1, and S. J. O’Shea2

  • 1Institute of High Performance Computing, 1 Science Park Road, Science Park II, Singapore 117528, Singapore
  • 2Institute of Materials Research & Engineering, 3 Research Link, Singapore 117602, Singapore

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Issue

Vol. 72, Iss. 8 — 15 August 2005

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