Abstract
We report on the experimental study of phonon properties and electron-phonon scattering in thin superconducting NbTiN films, which are intensively exploited in various applications. Studied NbTiN films with sub-10-nm thicknesses are disordered with respect to electron transport, the Ioffe-Regel parameter of ( is the Fermi wave vector, and is the electron mean free path), the inelastic electron-phonon interaction, and the product ( is the wave vector of a thermal phonon). By means of magnetoconductance and photoresponse techniques, we derive the inelastic electron-phonon scattering rate and determine sound velocities and phonon heat capacities. In the temperature range from 12 to 20 K, the scattering rate varies with temperature as ; its value extrapolated to 10 K amounts to approximately 1/16 ps. Making a comparative analysis of our films and other films used in superconducting devices, such as polycrystalline granular NbN and amorphous WSi, we find a systematic reduction of the sound velocity in all these films by about 50% compared to the corresponding bulk crystalline materials. A corresponding increase in the phonon heat capacities in all these films is, however, less than the Debye model predicts. We attribute these findings to reduced film dimensionality and film morphology.
1 More- Received 9 August 2021
- Accepted 11 November 2021
DOI:https://doi.org/10.1103/PhysRevB.104.184514
©2021 American Physical Society