Modeling the Lateral Wet Oxidation of AlxGa1xAs into Arbitrary Mesa Geometries

K. Alfaro-Bittner, R.G. Rojas, G. Lafleur, S. Calvez, G. Almuneau, M.G. Clerc, and S. Barbay
Phys. Rev. Applied 11, 044067 – Published 22 April 2019

Abstract

We report experimental and theoretical results on the lateral wet oxidation of bidimensional thin aluminum-rich layers into AlOx. We introduce a reaction-diffusion model of oxidation front propagation that includes effects of anisotropies and compare it to experimental results. This model can be used with any starting geometry, possibly nonconvex, and is deduced from the chemical reactions of wet oxidation of AlxGa1xAs -based layers. Numerical simulations performed with simple and complex geometries are in excellent agreement with the experimental observations. Our method is general and can apply to other oxides. It opens the way to the fine control of wet-oxidation fronts and to the formation of AlOx layers with a desired geometry that has numerous practical and relevant applications for, e.g., waveguiding or carrier confinement in photonics.

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  • Received 12 July 2018
  • Revised 8 January 2019
  • Corrected 30 April 2019

DOI:https://doi.org/10.1103/PhysRevApplied.11.044067

© 2019 American Physical Society

Physics Subject Headings (PhySH)

Condensed Matter, Materials & Applied PhysicsNonlinear Dynamics

Corrections

30 April 2019

Correction: A proof change request was not implemented properly in the text after Eq. (3) and has now been set right.

Authors & Affiliations

K. Alfaro-Bittner1, R.G. Rojas1, G. Lafleur2, S. Calvez2, G. Almuneau2, M.G. Clerc3, and S. Barbay4,*

  • 1Instituto de Física, Pontificia Universidad Católica de Valparaíso, Casilla 4059, Valparaíso, Chile
  • 2LAAS-CNRS, Université de Toulouse, CNRS, Toulouse, France
  • 3Departamento de Física and Millenium Institute for Research in Optics, Facultad de Ciencias Físicas y Matemáticas, Universidad de Chile, Santiago, Chile
  • 4Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, Palaiseau, France

  • *sylvain.barbay@c2n.upsaclay.fr

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Issue

Vol. 11, Iss. 4 — April 2019

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