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Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor

Haihua Wu, Liwen Sang, Yumeng Li, Tokuyuki Teraji, Tiefu Li, Masataka Imura, Jianqiang You, Yasuo Koide, Masaya Toda, and Meiyong Liao
Phys. Rev. Materials 2, 090601(R) – Published 28 September 2018
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Abstract

The reduction of the energy dissipation induced by defects is essential to achieve the ultrahigh-quality-factor mechanical resonators for the applications of quantum platform and high-sensitivity microelectromechanical (MEMS) and nanoelectromechanical system (NEMS) sensors. Single-crystal diamond (SCD) is the ideal material for high-quality-factor mechanical resonators due to its outstanding mechanical properties and intrinsic low-energy dissipation. To achieve mechanical resonators with extreme properties as well as high reliability, it is desirable to develop all-SCD mechanical resonators. By using a smart-cut method and atomic layer etching to remove the defects within the resonators, we achieve the SCD-on-SCD mechanical resonators with ultrahigh quality factors of over one million at room temperature. The quality factors are one or more orders of magnitude higher than those of the state-of-the-art MEMS cantilevers based on polycrystalline diamond, single-crystal silicon, and other crystal materials. The diamond MEMS resonators would be highly promising for sensor application as well as for the scheme for coupling with quantum centers in diamond.

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  • Received 5 July 2018
  • Revised 21 August 2018

DOI:https://doi.org/10.1103/PhysRevMaterials.2.090601

©2018 American Physical Society

Physics Subject Headings (PhySH)

Condensed Matter, Materials & Applied Physics

Authors & Affiliations

Haihua Wu1,2, Liwen Sang1, Yumeng Li1,3, Tokuyuki Teraji1, Tiefu Li4,*, Masataka Imura1, Jianqiang You2, Yasuo Koide1, Masaya Toda5, and Meiyong Liao1,†

  • 1National Institute for Materials Sciences, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
  • 2Beijing Computational Science Research Center, Beijing 100193, China
  • 3Department of Chemistry, The College of Wooster, 1189 Beall Avenue, Wooster, Ohio 44691, USA
  • 4Institute of Microelectronics, Tsinghua University, Beijing 100084, China
  • 5Graduate School of Engineering, Tohoku University, Sendai 980-8529, Japan

  • *litf@tsinghua.edu.cn
  • meiyong.liao@nims.go.jp

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Issue

Vol. 2, Iss. 9 — September 2018

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