Phase diagram of vicinal Si(001) surfaces

E. Pehlke and J. Tersoff
Phys. Rev. Lett. 67, 1290 – Published 2 September 1991
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Abstract

Vicinal Si(001) surfaces are believed to undergo a phase transition between single and double atomic height steps as either temperature or angle of miscut is varied. Here we calculate the full temperature-angle phase diagram, which is found to be quite different than previously believed. In particular, there is a critical point above which there is no phase transition at all. The results appear to explain the rather continuous behavior seen in a variety of experiments.

  • Received 22 May 1991

DOI:https://doi.org/10.1103/PhysRevLett.67.1290

©1991 American Physical Society

Authors & Affiliations

E. Pehlke and J. Tersoff

  • IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York 10598

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Issue

Vol. 67, Iss. 10 — 2 September 1991

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