• Open Access

X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis

Marie-Christine Zdora, Pierre Thibault, Tunhe Zhou, Frieder J. Koch, Jenny Romell, Simone Sala, Arndt Last, Christoph Rau, and Irene Zanette
Phys. Rev. Lett. 118, 203903 – Published 18 May 2017
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Abstract

We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.

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  • Received 13 November 2016

DOI:https://doi.org/10.1103/PhysRevLett.118.203903

Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI.

Published by the American Physical Society

Physics Subject Headings (PhySH)

Atomic, Molecular & OpticalGeneral PhysicsAccelerators & BeamsStatistical Physics & Thermodynamics

Authors & Affiliations

Marie-Christine Zdora1,2,*, Pierre Thibault3, Tunhe Zhou4,†, Frieder J. Koch5, Jenny Romell4, Simone Sala1,2, Arndt Last5, Christoph Rau1,6,7, and Irene Zanette1

  • 1Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United Kingdom
  • 2Department of Physics & Astronomy, University College London, London WC1E 6BT, United Kingdom
  • 3Department of Physics & Astronomy, University of Southampton, Southampton SO17 1BJ, United Kingdom
  • 4Department of Applied Physics, Royal Institute of Technology, 10691 Stockholm, Sweden
  • 5Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Germany
  • 6School of Materials, University of Manchester, Manchester M1 7HS, United Kingdom
  • 7Department of Otolaryngology, Northwestern University, Feinberg School of Medicine, Chicago, Illinois 60611, USA

  • *marie-christine.zdora@diamond.ac.uk
  • Present address: Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United Kingdom.

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Issue

Vol. 118, Iss. 20 — 19 May 2017

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