Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau, Timo Gans, Deborah O’Connell, Arthur Greb, Erik V. Johnson, and Jean-Paul Booth
Phys. Rev. Lett. 114, 125002 – Published 26 March 2015

Abstract

The ionization dynamics in geometrically symmetric parallel plate capacitively coupled plasmas driven by radio frequency tailored voltage waveforms is investigated using phase resolved optical emission spectroscopy (PROES) and particle-in-cell (PIC) simulations. Temporally asymmetric waveforms induce spatial asymmetries and offer control of the spatiotemporal dynamics of electron heating and associated ionization structures. Sawtooth waveforms with different rise and fall rates are employed using truncated Fourier series approximations of an ideal sawtooth. Experimental PROES results obtained in argon plasmas are compared with PIC simulations, showing excellent agreement. With waveforms comprising a fast voltage drop followed by a slower rise, the faster sheath expansion in front of the powered electrode causes strongly enhanced ionization in this region. The complementary waveform causes an analogous effect in front of the grounded electrode.

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  • Received 18 December 2014

DOI:https://doi.org/10.1103/PhysRevLett.114.125002

© 2015 American Physical Society

Authors & Affiliations

Bastien Bruneau1,*, Timo Gans2, Deborah O’Connell2, Arthur Greb2, Erik V. Johnson1, and Jean-Paul Booth3

  • 1LPICM-CNRS, Ecole Polytechnique, route de Saclay, 91120 Palaiseau, France
  • 2York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DD York, United Kingdom
  • 3LPP-CNRS, Ecole Polytechnique, route de Saclay, 91120 Palaiseau, France

  • *Corresponding author. bastien.bruneau@polytechnique.edu

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Vol. 114, Iss. 12 — 27 March 2015

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