Conventional Transmission Electron Microscopy Imaging beyond the Diffraction and Information Limits

Andreas Rosenauer, Florian F. Krause, Knut Müller, Marco Schowalter, and Thorsten Mehrtens
Phys. Rev. Lett. 113, 096101 – Published 29 August 2014
PDFHTMLExport Citation

Abstract

There are mainly two complementary imaging modes in transmission electron microscopy (TEM): Conventional TEM (CTEM) and scanning TEM (STEM). In the CTEM mode the specimen is illuminated with a plane electron wave, and the direct image formed by the objective lens is recorded in the image plane. STEM is based on scanning the specimen surface with a focused electron beam and collecting scattered electrons with an extended disk or ring-shaped detector. Here we show that combination of CTEM imaging with STEM illumination generally allows extending the point resolution of CTEM imaging beyond the diffraction limit. This new imaging mode improves imaging characteristics, is more robust against chromatic aberration, exhibits direct structural imaging with superior precision, visualizes light elements with excellent contrast, and even allows us to overcome the conventional information limit of a microscope.

  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
  • Received 28 March 2014

DOI:https://doi.org/10.1103/PhysRevLett.113.096101

© 2014 American Physical Society

Authors & Affiliations

Andreas Rosenauer*, Florian F. Krause, Knut Müller, Marco Schowalter, and Thorsten Mehrtens

  • Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany

  • *rosenauer@ifp.uni-bremen.de

Article Text (Subscription Required)

Click to Expand

Supplemental Material (Subscription Required)

Click to Expand

References (Subscription Required)

Click to Expand
Issue

Vol. 113, Iss. 9 — 29 August 2014

Reuse & Permissions
Access Options
Author publication services for translation and copyediting assistance advertisement

Authorization Required


×
×

Images

×

Sign up to receive regular email alerts from Physical Review Letters

Log In

Cancel
×

Search


Article Lookup

Paste a citation or DOI

Enter a citation
×