High-Resolution Multislice X-Ray Ptychography of Extended Thick Objects

Akihiro Suzuki, Shin Furutaku, Kei Shimomura, Kazuto Yamauchi, Yoshiki Kohmura, Tetsuya Ishikawa, and Yukio Takahashi
Phys. Rev. Lett. 112, 053903 – Published 4 February 2014
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Abstract

We report the first demonstration of hard x-ray ptychography using a multislice approach, which can solve the problem of the limited spatial resolution under the projection approximation. We measured ptychographic diffraction patterns of a two-layered object with a 105μm gap using 7 keV focused coherent x rays. We successfully reconstructed the phase map of each layer at 50nm resolution using a multislice approach, while the resolution was worse than 192nm under the projection approximation. The present method has the potential to enable the three-dimensional high-resolution observation of extended thick specimens in materials science and biology.

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  • Received 12 August 2013

DOI:https://doi.org/10.1103/PhysRevLett.112.053903

© 2014 American Physical Society

Authors & Affiliations

Akihiro Suzuki1, Shin Furutaku1, Kei Shimomura1, Kazuto Yamauchi1, Yoshiki Kohmura2, Tetsuya Ishikawa2, and Yukio Takahashi1,*

  • 1Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • 2RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo, Hyogo 679-5148, Japan

  • *To whom all correspondence should be addressed. takahashi@prec.eng.osaka-u.ac.jp

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Vol. 112, Iss. 5 — 7 February 2014

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