Strain Relaxation and Vacancy Creation in Thin Platinum Films

W. Gruber, S. Chakravarty, C. Baehtz, W. Leitenberger, M. Bruns, A. Kobler, C. Kübel, and H. Schmidt
Phys. Rev. Lett. 107, 265501 – Published 19 December 2011

Abstract

Synchrotron based combined in situ x-ray diffractometry and reflectometry is used to investigate the role of vacancies for the relaxation of residual stress in thin metallic Pt films. From the experimentally determined relative changes of the lattice parameter a and of the film thickness L the modification of vacancy concentration and residual strain was derived as a function of annealing time at 130°C. The results indicate that relaxation of strain resulting from compressive stress is accompanied by the creation of vacancies at the free film surface. This proves experimentally the postulated dominant role of vacancies for stress relaxation in thin metal films close to room temperature.

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  • Received 29 August 2011

DOI:https://doi.org/10.1103/PhysRevLett.107.265501

© 2011 American Physical Society

Authors & Affiliations

W. Gruber1, S. Chakravarty1,*, C. Baehtz2, W. Leitenberger3, M. Bruns4,6, A. Kobler5,6, C. Kübel5,6, and H. Schmidt1,†

  • 1Technische Universität Clausthal, Institut für Metallurgie, Clausthal-Zellerfeld, Germany
  • 2Helmholtz Zentrum Dresden Rossendorf, Institute of Ion Beam Physics & Materials Research, Dresden, Germany
  • 3Universität Potsdam, Institut für Physik und Astronomie, Potsdam, Germany
  • 4Karlsruher Institut für Technologie, Institute for Applied Materials, Eggenstein-Leopoldshafen, Germany
  • 5Karlsruher Institut für Technologie, Institute of Nanotechnology, Eggenstein-Leopoldshafen, Germany
  • 6Karlsruher Institut für Technologie, Karlsruher Micro Nano Facility, Eggenstein-Leopoldshafen, Germany

  • *Present address: UGC-DAE Consortium for Scientific Research, Kalpakkam 603102, India.
  • Corresponding author.

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Issue

Vol. 107, Iss. 26 — 23 December 2011

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