Spreading of rinsing liquids across a horizontal rotating substrate

Daniel J. Walls, Andrew S. Ylitalo, David S. L. Mui, John M. Frostad, and Gerald G. Fuller
Phys. Rev. Fluids 4, 084102 – Published 7 August 2019

Abstract

‘‘Rinsing” liquids and their dynamics are interesting both fundamentally in the interaction of several classic modes of spreading, and industrially in a variety of cleaning applications, such as in the manufacturing of silicon wafers. In this paper, we investigate the time-dependent spreading behavior of a rinsing liquid across a horizontal, rotating substrate; the rinsing liquid is applied to the center of the rotating substrate as an orthogonal impinging jet of constant volumetric flow. We present experimental findings on the azimuthally averaged outer radius of the spreading liquid, in which we observed four distinct growth behaviors in time. We use lubrication theory to explain these phenomena and to define boundaries within the explored parameter space where each was observed. In the absence of rotation, capillarity dominates and the spreading radius grows as t4/10. When centrifugal forces dominate the spreading process, several time dependencies of the spreading radius are possible, with lubrication theory predicting exponential growth as well as power laws of t3/4 and t3/2.

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  • Received 6 December 2018

DOI:https://doi.org/10.1103/PhysRevFluids.4.084102

©2019 American Physical Society

Physics Subject Headings (PhySH)

Fluid Dynamics

Authors & Affiliations

Daniel J. Walls1,*,†, Andrew S. Ylitalo1,*,‡, David S. L. Mui2, John M. Frostad1,†,§, and Gerald G. Fuller1,∥

  • 1Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA
  • 2Lam Research Corporation, Fremont, California 94538, USA

  • *D.J.W. and A.S.Y. contributed equally to this work.
  • Present address: Department of Chemical and Biological Engineering, University of British Columbia, Vancouver, British Columbia V6T 1Z3, Canada.
  • Present address: Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125, United States.
  • §jfrostad@mail.ubc.ca; Present address: Food Science, University of British Columbia, Vancouver, British Columbia V6T 1Z3, Canada.
  • ggf@stanford.edu

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Issue

Vol. 4, Iss. 8 — August 2019

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