Abstract
3D reciprocal space mapping in the grazing incidence small-angle x-ray scattering geometry was used to obtain accurate morphological characteristics of nanoripple patterns prepared by broad beam-ion sputtering of AlO and SiN amorphous thin films as well as 2D arrays of Ag nanoparticles obtained by glancing angle deposition on AlO nanorippled buffer layers. Experiments and theoretical simulations based on the distorted-wave Born approximation make it possible to determine the average 3D shape of the ripples and nanoparticles together with crucial information on their in-plane organization. In the case of nanoparticle arrays, the approach was also used to quantify the growth conformity of an additional capping layer, which proceeds by replication of the buried ripple pattern.
6 More- Received 20 February 2012
DOI:https://doi.org/10.1103/PhysRevB.85.235415
©2012 American Physical Society