Implantation of keV-energy argon clusters and radiation damage in diamond

V. N. Popok, J. Samela, K. Nordlund, and V. P. Popov
Phys. Rev. B 85, 033405 – Published 17 January 2012

Abstract

We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.

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  • Received 20 September 2011

DOI:https://doi.org/10.1103/PhysRevB.85.033405

©2012 American Physical Society

Authors & Affiliations

V. N. Popok*

  • Department of Physics and Nanotechnology, Aalborg University, Skjernvej 4A, DK-9220 Aalborg Øst, Denmark

J. Samela and K. Nordlund

  • Department of Physics and Helsinki Institute of Physics, University of Helsinki, P.O. Box 43, FI-00014 Helsinki, Finland

V. P. Popov

  • Institute of Semiconductor Physics, Lavrentieva Avenue 13, 630090 Novosibirsk, Russia

  • *vp@nano.aau.dk

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Vol. 85, Iss. 3 — 15 January 2012

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