Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

V. P. Adiga, A. V. Sumant, S. Suresh, C. Gudeman, O. Auciello, J. A. Carlisle, and R. W. Carpick
Phys. Rev. B 79, 245403 – Published 2 June 2009

Abstract

We have characterized mechanical properties of ultrananocrystalline diamond (UNCD) thin films grown using the hot filament chemical vapor deposition (HFCVD) technique at 680°C, significantly lower than the conventional growth temperature of 800°C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1μm thick, exhibit a net residual compressive stress of 370±1MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 838±2GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum (UHV) conditions in a customized UHV atomic force microscope system to determine Young’s modulus as well as mechanical dissipation of cantilever structures at room temperature. Young’s modulus is found to be 790±30GPa. Based on these measurements, Poisson’s ratio is estimated to be 0.057±0.038. The quality factors (Q) of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD resonators.

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  • Received 27 January 2009

DOI:https://doi.org/10.1103/PhysRevB.79.245403

©2009 American Physical Society

Authors & Affiliations

V. P. Adiga1, A. V. Sumant2, S. Suresh3, C. Gudeman3, O. Auciello2,4, J. A. Carlisle5, and R. W. Carpick1,6

  • 1Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA
  • 2Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA
  • 3Innovative Micro Technology, Santa Barbara, California 93117, USA
  • 4Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
  • 5Advanced Diamond Technologies, Romeoville, Illinois 60446, USA
  • 6Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA

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Issue

Vol. 79, Iss. 24 — 15 June 2009

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