Abstract
A low-energy electron microscopy study of two-dimensional Si(001) island shapes near thermal equilibrium on large single-domain terraces reveals a continuous increase of island aspect ratio and a shape transition from elliptical to “American-football”-like with increasing island size. The size-dependent island shapes are driven by elastic relaxation caused by the intrinsic surface stress anisotropy present on Si(001). Analysis of the measured elliptical island shapes based on an elastic-model calculation allows a quantitative determination of step energies and of the surface stress anisotropy as a function of temperature.
- Received 6 September 2001
DOI:https://doi.org/10.1103/PhysRevB.64.201320
©2001 American Physical Society