Precipitate coarsening and self organization in erbium-doped silica

M. W. Sckerl, S. Guldberg-Kjaer, M. Rysholt Poulsen, P. Shi, and J. Chevallier
Phys. Rev. B 59, 13494 – Published 1 June 1999
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Abstract

The influence of heat treatment at and above 1100°C on thin erbium-rich silica layers embedded in silica has been studied experimentally by secondary ion-mass spectrometry and cross-sectional transmission electron microscopy. Redistribution of erbium atoms is observed at these temperatures, and formation of erbium-rich precipitates is seen to occur if the erbium concentration exceeds 0.01 at. %. These precipitates are observed to coarsen and subsequently dissolve with increasing annealing time. Moreover, self organization of precipitates has been observed in the form of layering of the precipitate ensemble.

  • Received 19 January 1999

DOI:https://doi.org/10.1103/PhysRevB.59.13494

©1999 American Physical Society

Authors & Affiliations

M. W. Sckerl, S. Guldberg-Kjaer, M. Rysholt Poulsen, and P. Shi

  • Mikroelektronik Centret, Technical University of Denmark, Building 345E, DK-2800 Lyngby, Denmark

J. Chevallier

  • Institute of Physics and Astronomy, University of Aarhus, DK-8000 Aarhus C, Denmark

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Vol. 59, Iss. 21 — 1 June 1999

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