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Stress-induced layer-by-layer growth of Ge on Si(100)

J. Tersoff
Phys. Rev. B 43, 9377(R) – Published 15 April 1991
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Abstract

Several experiments have found that Ge initially grows layer by layer on the Si(100)2×1 surface, up to a thickness of 3 atomic layers. Further growth occurs via islands. Here, model calculations show that layer-by-layer growth is stabilized for up to 3 layers because it reduces the strain energy associated with the surface dimerization.

  • Received 10 January 1991

DOI:https://doi.org/10.1103/PhysRevB.43.9377

©1991 American Physical Society

Authors & Affiliations

J. Tersoff

  • IBM Research Division, Thomas J. Watson Reserach Center, Yorktown Heights, New York 10598

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Issue

Vol. 43, Iss. 11 — 15 April 1991

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