Electronic sputtering of condensed O2

K. M. Gibbs, W. L. Brown, and R. E. Johnson
Phys. Rev. B 38, 11001 – Published 1 December 1988
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Abstract

The electronically induced sputtering of solid oxygen films has been measured using helium and hydrogen ions with energies from 0.3 to 3.5 MeV. The sputtering yield exhibits a linear dependence on (dE/dx)e, the electronic stopping power of the ions, at low (dE/dx)e, with a transition to an approximately quadratic dependence at high (dE/dx)e. These results are similar to those found for solid N2 but differ from those for solid CO. The electronic sputtering yield of oxygen has also been measured as a function of the angle of incidence of singly charged and charge-state-equilibrated helium ions at 2 MeV. The angular dependence of the yield is approximately (cosθ)1.6 and is essentially the same for both the singly charged and equilibrated ions, although the absolute yields are a factor of 1.2 higher for the charge-state-equilibrated ions. The measured angular dependence in the quadratic sputtering regime is remarkably well accounted for by a model of diffusive energy transport to the surface and sputtering by a collective process.

  • Received 21 June 1988

DOI:https://doi.org/10.1103/PhysRevB.38.11001

©1988 American Physical Society

Authors & Affiliations

K. M. Gibbs

  • Department of Nuclear Engineering and Engineering Physics, University of Virginia, Charlottesville, Virginia 22901

W. L. Brown

  • AT&T Bell Laboratories, Murray Hill, New Jersey 07974

R. E. Johnson

  • Department of Nuclear Engineering and Engineering Physics, University of Virginia, Charlottesville, Virginia 22901

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Vol. 38, Iss. 16 — 1 December 1988

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