Abstract
Here, we present thorough research into high-order vector Bessel-Gauss beams from a theoretical perspective, with experimental realization and application to transparent-material laser micromachining. Efficient, stable, high-quality, and power-vector Bessel-Gauss beam generation using two geometric-phase-based optical elements, a high-order -wave plate and an axicon in combination with simple optical elements, such as lenses, wave plates, and polarizers, is demonstrated. Ultrashort pulse-vector Bessel-Gauss beams are used to induce modifications in the glass, creating three-dimensional tubular structures of type I and type II modification in D263T glass. Furthermore, samples containing tubular modifications are tested for etch selectivity in the femtosecond-laser-induced chemical-etching method with KOH solution by etching throughout channels.
2 More- Received 28 December 2020
- Revised 15 July 2021
- Accepted 9 August 2021
DOI:https://doi.org/10.1103/PhysRevApplied.16.034001
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