Performance predictions for a laser-intensified thermal beam for use in high-resolution focused-ion-beam instruments

S. H. W. Wouters, G. ten Haaf, R. P. M. J. W. Notermans, N. Debernardi, P. H. A. Mutsaers, O. J. Luiten, and E. J. D. Vredenbregt
Phys. Rev. A 90, 063817 – Published 15 December 2014

Abstract

Photoionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in focused-ion-beam instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with an equivalent brightness of 2.1×107 A/(m2 sr eV) can be created using a compact 5 cm long two-dimensional magneto-optical compressor. If this can be conserved during the photoionization process, this leads to an ion beam brightness an order of magnitude higher than produced by a liquid metal ion source. The source is also capable of producing a flux of 6.2×109 s1 that results in a substantial beam current of 1 nA once fully ionized.

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  • Received 17 October 2014

DOI:https://doi.org/10.1103/PhysRevA.90.063817

©2014 American Physical Society

Authors & Affiliations

S. H. W. Wouters, G. ten Haaf, R. P. M. J. W. Notermans*, N. Debernardi, P. H. A. Mutsaers, O. J. Luiten, and E. J. D. Vredenbregt

  • Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, Netherlands

  • *Present address: LaserLaB, Department of Physics and Astronomy, VU University Amsterdam, De Boelelaan 1081, 1081 HV Amsterdam, Netherlands.
  • Present address: Equipment for Additive Manufacturing, Netherlands Organization for Applied Scientific Research TNO, De Rondom 1, 5612 AP Eindhoven, Netherlands.
  • Corresponding author: e.j.d.vredenbregt@tue.nl

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Vol. 90, Iss. 6 — December 2014

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