He-atom diffraction from nanostructure transmission gratings: The role of imperfections

R. E. Grisenti, W. Schöllkopf, J. P. Toennies, J. R. Manson, T. A. Savas, and Henry I. Smith
Phys. Rev. A 61, 033608 – Published 15 February 2000
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Abstract

The relative diffraction peak intensities of He atoms with an incident beam energy of 65 meV diffracted from a microfabricated 100 nm-period transmission grating are analyzed using both Fresnel and Fraunhofer diffraction theory. The projected slit width could be varied from 50 nm down to less than 1 nm by inclining the grating at angles up to Θ0=42° with respect to the incident beam. Good agreement between calculated and measured peak intensities, up to the sixth order, is obtained by accounting for random deviations in the slit positions, and averaging over the velocity spread of the incident beam as well as the spatial extent of the nozzle beam source. It is demonstrated that He atom beam diffraction together with simple transmission measurements is an excellent means of characterizing such gratings including a detailed determination of the slit width, the bar shape, and random as well as periodic disorder.

  • Received 2 March 1999

DOI:https://doi.org/10.1103/PhysRevA.61.033608

©2000 American Physical Society

Authors & Affiliations

R. E. Grisenti, W. Schöllkopf, and J. P. Toennies

  • Max-Planck-Institut für Strömungsforschung, Bunsenstraße 10, 37073 Göttingen, Germany

J. R. Manson

  • Department of Physics and Astronomy, Clemson University, Clemson, South Carolina 29634

T. A. Savas and Henry I. Smith

  • Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

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Vol. 61, Iss. 3 — March 2000

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