Phys. Rev. 76, 153 (1949) - Cathode Sputtering in the Abnormal Glow Discharge

Cathode Sputtering in the Abnormal Glow Discharge

Richard Hanau

Phys. Rev. 76, 153 – Published 1 July 1949

Abstract

Received 23 May 1949

DOI:https://doi.org/10.1103/PhysRev.76.153

©1949 American Physical Society

Authors & Affiliations

Department of Physics, University of Michigan, Ann Arbor, Michigan

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Issue

Vol. 76, Iss. 1 — July 1949

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