Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray Optics

K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David
Phys. Rev. Lett. 99, 264801 – Published 28 December 2007

Abstract

A method for the fabrication of ultrahigh-resolution Fresnel zone plate lenses for x-ray microscopy is demonstrated. It is based on the deposition of a zone plate material (Ir) onto the sidewalls of a prepatterned template structure (Si) using an atomic layer deposition technique. This results in a doubling of the effective zone density, thus improving the achievable resolution of x-ray microscopes. Test structures with lines and spaces down to 15 nm were resolved in a scanning transmission x-ray microscope at 1 keV photon energy.

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  • Received 18 September 2007

DOI:https://doi.org/10.1103/PhysRevLett.99.264801

©2007 American Physical Society

Authors & Affiliations

K. Jefimovs1,2, J. Vila-Comamala3, T. Pilvi4, J. Raabe1, M. Ritala4, and C. David1

  • 1Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • 2EMPA, CH-8600 Dübendorf, Switzerland
  • 3Laboratori de Llum Sincrotró, E-08193 Bellaterra, Spain
  • 4Laboratory of Inorganic Chemistry, University of Helsinki, FI-00014 Helsinki, Finland

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Issue

Vol. 99, Iss. 26 — 31 December 2007

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