Precision Measurement of the Casimir Force from 0.1 to $0.9\mathit{\mu }m$

We have used an atomic force microscope to make precision measurements of the Casimir force between a metallized sphere of diameter 196 μm and flat plate. The force was measured for plate-sphere surface separations from 0.1 to 0.9 μm. The experimental results are consistent with present theoretical calculations including the finite conductivity, roughness, and temperature corrections. The root mean square average deviation of 1.6 pN between theory and experiment corresponds to a $1\%$ deviation at the smallest separation.