Embedding of Nanoscale 3D SiGe Islands in a Si Matrix

P. Sutter and M. G. Lagally
Phys. Rev. Lett. 81, 3471 – Published 19 October 1998
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Abstract

The epitaxial embedding of faceted three-dimensional SiGe islands in a Si matrix has been investigated by low-energy electron microscopy. Under a Si flux these islands expand and undergo a shape change to incorporate a (100) top facet. A physical interpretation of the atomistic mechanism producing the shape change is presented and supported with a simple model.

  • Received 28 May 1998

DOI:https://doi.org/10.1103/PhysRevLett.81.3471

©1998 American Physical Society

Authors & Affiliations

P. Sutter and M. G. Lagally

  • University of Wisconsin—Madison, Madison, Wisconsin 53706

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Vol. 81, Iss. 16 — 19 October 1998

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