Abstract
To understand the atomistic doping process of phosphorus in germanium, we present a combined scanning tunneling microscopy, temperature programed desorption, and density functional theory study of the reactions of phosphine with the Ge(001) surface. Combining experimental and theoretical results, we demonstrate that with a footprint of one Ge dimer is the only product of room temperature chemisorption. Further dissociation requires thermal activation. At saturation coverage, species self-assemble into ordered patterns leading to phosphorus coverages of up to 0.5 monolayers.
- Received 16 March 2012
DOI:https://doi.org/10.1103/PhysRevLett.109.076101
© 2012 American Physical Society