Accurate Measurement of Electron Beam Induced Displacement Cross Sections for Single-Layer Graphene

Jannik C. Meyer, Franz Eder, Simon Kurasch, Viera Skakalova, Jani Kotakoski, Hye Jin Park, Siegmar Roth, Andrey Chuvilin, Sören Eyhusen, Gerd Benner, Arkady V. Krasheninnikov, and Ute Kaiser
Phys. Rev. Lett. 108, 196102 – Published 7 May 2012; Erratum Phys. Rev. Lett. 110, 239902 (2013)
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Abstract

We present an accurate measurement and a quantitative analysis of electron-beam-induced displacements of carbon atoms in single-layer graphene. We directly measure the atomic displacement (“knock-on”) cross section by counting the lost atoms as a function of the electron-beam energy and applied dose. Further, we separate knock-on damage (originating from the collision of the beam electrons with the nucleus of the target atom) from other radiation damage mechanisms (e.g., ionization damage or chemical etching) by the comparison of ordinary (C12) and heavy (C13) graphene. Our analysis shows that a static lattice approximation is not sufficient to describe knock-on damage in this material, while a very good agreement between calculated and experimental cross sections is obtained if lattice vibrations are taken into account.

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  • Received 18 January 2012

DOI:https://doi.org/10.1103/PhysRevLett.108.196102

© 2012 American Physical Society

Erratum

Erratum: Accurate Measurement of Electron Beam Induced Displacement Cross Sections for Single-Layer Graphene [Phys. Rev. Lett. 108, 196102 (2012)]

Jannik C. Meyer, Franz Eder, Simon Kurasch, Viera Skakalova, Jani Kotakoski, Hye Jin Park, Siegmar Roth, Andrey Chuvilin, Sören Eyhusen, Gerd Benner, Arkady V. Krasheninnikov, and Ute Kaiser
Phys. Rev. Lett. 110, 239902 (2013)

Authors & Affiliations

Jannik C. Meyer1,2,*, Franz Eder2, Simon Kurasch1, Viera Skakalova3,2, Jani Kotakoski4,2, Hye Jin Park3, Siegmar Roth3,5, Andrey Chuvilin1,6, Sören Eyhusen7, Gerd Benner7, Arkady V. Krasheninnikov4,8, and Ute Kaiser1,†

  • 1Central Facility for Electron Microscopy, Group of Electron Microscopy of Materials Science, University of Ulm, Albert Einstein Allee 11, 89081 Ulm, Germany
  • 2University of Vienna, Department of Physics, Boltzmanngasse 5, 1090 Vienna, Austria
  • 3Max Planck Institute for Solid State Research, Heisenbergstrasse 1, 70569 Stuttgart, Germany
  • 4Department of Physics, University of Helsinki, P.O. Box 43, 00014 Helsinki, Finland
  • 5WCU Flexible Electronics, School of Electrical Engineering, Korea University, Seoul, Korea
  • 6CIC nanoGUNE Consolider, Avenida de Tolosa 76, 20018, San Sebastian, Spain and Ikerbasque, Basque Foundation for Science, 48011, Bilbao, Spain
  • 7Carl Zeiss NTS GmbH, Carl-Zeiss-Strasse 56, 73447 Oberkochen, Germany
  • 8Department of Applied Physics, Aalto University, P.O. Box 1100, 00076 Aalto, Finland

  • *Corresponding author. jannik.meyer@univie.ac.at
  • Corresponding author. ute.kaiser@uni-ulm.de

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Issue

Vol. 108, Iss. 19 — 11 May 2012

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