Quantitative Atomic Resolution Scanning Transmission Electron Microscopy

James M. LeBeau, Scott D. Findlay, Leslie J. Allen, and Susanne Stemmer
Phys. Rev. Lett. 100, 206101 – Published 23 May 2008

Abstract

Complete understanding of atomic resolution high-angle annular dark-field (Z-contrast) images requires quantitative agreement between simulations and experiments. We show that intensity variations can be placed on an absolute scale by normalizing the measured image intensities to the incident beam. We construct fractional intensity images of a SrTiO3 single crystal for regions of different thickness up to 120 nm. Experimental images are compared directly with image simulations. Provided that spatial incoherence is taken into account in the simulations, almost perfect agreement is found between simulation and experiment.

  • Figure
  • Figure
  • Figure
  • Received 1 February 2008

DOI:https://doi.org/10.1103/PhysRevLett.100.206101

©2008 American Physical Society

Authors & Affiliations

James M. LeBeau1,*, Scott D. Findlay2, Leslie J. Allen3, and Susanne Stemmer4,†

  • 1Materials Department, University of California, Santa Barbara, California 93106-5050, USA
  • 2Institute of Engineering Innovation, School of Engineering, The University of Tokyo, Tokyo, 113-8656, Japan
  • 3School of Physics, University of Melbourne, Victoria 3010, Australia
  • 4Materials Department, University of California, Santa Barbara, California 93106-5050, USA

  • *lebeau@mrl.ucsb.edu
  • stemmer@mrl.ucsb.edu

Article Text (Subscription Required)

Click to Expand

References (Subscription Required)

Click to Expand
Issue

Vol. 100, Iss. 20 — 23 May 2008

Reuse & Permissions
Access Options
Author publication services for translation and copyediting assistance advertisement

Authorization Required


×
×

Images

×

Sign up to receive regular email alerts from Physical Review Letters

Log In

Cancel
×

Search


Article Lookup

Paste a citation or DOI

Enter a citation
×