Nanoscale Imaging of Buried Structures with Elemental Specificity Using Resonant X-Ray Diffraction Microscopy

Changyong Song, Raymond Bergstrom, Damien Ramunno-Johnson, Huaidong Jiang, David Paterson, Martin D. de Jonge, Ian McNulty, Jooyoung Lee, Kang L. Wang, and Jianwei Miao
Phys. Rev. Lett. 100, 025504 – Published 18 January 2008
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Abstract

We report the first demonstration of resonant x-ray diffraction microscopy for element specific imaging of buried structures with a pixel resolution of 15nm by exploiting the abrupt change in the scattering cross section near electronic resonances. We performed nondestructive and quantitative imaging of buried Bi structures inside a Si crystal by directly phasing coherent x-ray diffraction patterns acquired below and above the Bi M5 edge. We anticipate that resonant x-ray diffraction microscopy will be applied to element and chemical state specific imaging of a broad range of systems including magnetic materials, semiconductors, organic materials, biominerals, and biological specimens.

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  • Received 1 August 2007

DOI:https://doi.org/10.1103/PhysRevLett.100.025504

©2008 American Physical Society

Authors & Affiliations

Changyong Song1, Raymond Bergstrom1, Damien Ramunno-Johnson1, Huaidong Jiang1, David Paterson2, Martin D. de Jonge3, Ian McNulty3, Jooyoung Lee4, Kang L. Wang4, and Jianwei Miao1,*

  • 1Department of Physics and Astronomy, University of California, Los Angeles, California 90095, USA
  • 2Australian Synchrotron, 800 Blackburn Road, Clayton, VIC 3168, Australia
  • 3Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, USA
  • 4Department of Electrical Engineering, University of California, Los Angeles, California 90095, USA

  • *miao@physics.ucla.edu

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Vol. 100, Iss. 2 — 18 January 2008

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