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Experimental study of a planar atmospheric-pressure plasma operating in the microplasma regime

A. J. Wagner, D. Mariotti, K. J. Yurchenko, and T. K. Das
Phys. Rev. E 80, 065401(R) – Published 15 December 2009

Abstract

Electrical characterization of a nonthermal radio-frequency atmospheric-pressure microplasma in a parallel plate configuration has shown that reducing electrode gap into the submillimeter range increases current and power density at a reduced voltage as compared to similar plasmas at larger electrode gaps which have no gap dependence. Calculation of sheath thickness and electric fields in the sheath and in the bulk demonstrate a dependence on the electrode gap as it is reduced into the submillimeter regime, indicating a distinct regime of operation.

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  • Received 12 May 2009

DOI:https://doi.org/10.1103/PhysRevE.80.065401

©2009 American Physical Society

Authors & Affiliations

A. J. Wagner1,2, D. Mariotti1,3,*, K. J. Yurchenko1, and T. K. Das4

  • 1Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester, New York 14623, USA
  • 2Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455, USA
  • 3Nanotechnology & Advanced Materials Research Institute (NAMRI), University of Ulster, Newtownabbey BT37 0QB, United Kingdom
  • 4Department of Mechanical Engineering, Rochester Institute of Technology, Rochester, New York 14623, USA

  • *d.mariotti@ulster.ac.uk

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Vol. 80, Iss. 6 — December 2009

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