Resputtering phenomena and determination of composition in codeposited films

J. M. Gregoire, M. B. Lobovsky, M. F. Heinz, F. J. DiSalvo, and R. B. van Dover
Phys. Rev. B 76, 195437 – Published 26 November 2007
PDFHTMLExport Citation

Abstract

The use of standard characterization techniques to determine elemental compositions in composition spread thin films is time intensive. Combinatorial, high-throughput studies of thin film materials demand high-throughput determination of film composition. We discuss the possibility of calculating codeposited film compositions from deposition profiles obtained during single-source sputtering. In the context of dc magnetron sputtering, we find that while this technique is appropriate for the Pd,Pt,Ti system, it yields atomic ratios in a Pt,Pb composition spread thin film that vary significantly from values measured with wavelength-dispersive x-ray spectroscopy. A model for resputtering during codeposition is presented to account for these discrepancies and the model is used to calculate resputter rates during Pt,Pb codeposition. We also employ our model to estimate the resputtering susceptibility of commonly sputtered elements.

  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
2 More
  • Received 13 June 2007

DOI:https://doi.org/10.1103/PhysRevB.76.195437

©2007 American Physical Society

Authors & Affiliations

J. M. Gregoire

  • Department of Physics, and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853, USA

M. B. Lobovsky and M. F. Heinz

  • Department of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA

F. J. DiSalvo

  • Department of Chemistry and Chemical Biology, and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853, USA

R. B. van Dover

  • Department of Materials Science and Engineering, and Cornell Fuel Cell Institute, Cornell University, Ithaca, New York 14853, USA

Article Text (Subscription Required)

Click to Expand

Supplemental Material (Subscription Required)

Click to Expand

References (Subscription Required)

Click to Expand
Issue

Vol. 76, Iss. 19 — 15 November 2007

Reuse & Permissions
Access Options
Author publication services for translation and copyediting assistance advertisement

Authorization Required


×
×

Images

×

Sign up to receive regular email alerts from Physical Review B

Log In

Cancel
×

Search


Article Lookup

Paste a citation or DOI

Enter a citation
×