X-ray scattering from real surfaces: Discrete and continuous components of roughness

Darren Dale, Aaron Fleet, Y. Suzuki, and J. D. Brock
Phys. Rev. B 74, 085419 – Published 29 August 2006

Abstract

Incoherent surface scattering yields a statistical description of the surface, due to the ensemble averaging over many independently sampled volumes. Depending on the state of the surface and direction of the scattering vector relative to the surface normal, the height distribution is discrete, continuous, or a combination of the two. We present a treatment for the influence of multimodal surface height distributions on crystal truncation rod scattering. The effects of a multimodal height distribution are especially evident during in situ monitoring of layer-by-layer thin-film growth via pulsed laser deposition. We model the total height distribution as a convolution of discrete and continuous components, resulting in a broadly applicable parametrization of surface roughness which can be applied to other scattering probes, such as electrons and neutrons. Convolution of such distributions could potentially be applied to interface or chemical scattering. Here we find that this analysis describes accurately our experimental studies of ⟨001⟩ SrTiO3 annealing and homoepitaxial growth.

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  • Received 17 April 2006

DOI:https://doi.org/10.1103/PhysRevB.74.085419

©2006 American Physical Society

Authors & Affiliations

Darren Dale1,2,*, Aaron Fleet3,2,†, Y. Suzuki4, and J. D. Brock3,2

  • 1Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA
  • 2Cornell Center for Materials Research, Cornell University, Ithaca, New York 14853, USA
  • 3School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA
  • 4Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA

  • *Present address: Cornell High Energy Synchrotron Source, Cornell University, Ithaca, New York 14853, USA. Electronic address: dd55@cornell.edu
  • Present address: MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA 02420, USA.

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Issue

Vol. 74, Iss. 8 — 15 August 2006

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