Texture evolution during shadowing growth of isolated Ru columns

F. Tang, T. Karabacak, P. Morrow, C. Gaire, G.-C. Wang, and T.-M. Lu
Phys. Rev. B 72, 165402 – Published 3 October 2005

Abstract

The Ru vertical rods with different lengths were grown by dc magnetron sputtering under oblique angle deposition with substrate rotation. The deposition rate was 4.1±0.2nmmin and the substrate was near room temperature during the growth. The crystalline structure and morphology of these rods were characterized as a function of time by reflection high energy electron diffraction (RHEED), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). We observed that the rods developed a (101¯0) texture and the dispersion angle Δθ of the texture evolved in a power law relationship with respect to time t before saturation, Δθtp, where p=0.49±0.01. Through the analysis of the SEM images, we can correlate the evolution of the dispersion of columns tilt angle to the evolution of the texture axis extracted from RHEED patterns. The power law relationship is consistent with our simulations based on a modified needle model.

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  • Received 7 April 2005

DOI:https://doi.org/10.1103/PhysRevB.72.165402

©2005 American Physical Society

Authors & Affiliations

F. Tang, T. Karabacak, P. Morrow, C. Gaire, G.-C. Wang, and T.-M. Lu

  • Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, New York 12180-3590, USA

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Vol. 72, Iss. 16 — 15 October 2005

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