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First-principles calculation of the effect of strain on the diffusion of Ge adatoms on Si and Ge(001) surfaces

A. van de Walle, M. Asta, and P. W. Voorhees
Phys. Rev. B 67, 041308(R) – Published 31 January 2003
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Abstract

First-principles calculations are used to calculate the strain dependencies of the binding and diffusion-activation energies for Ge adatoms on both Si(001) and Ge(001) surfaces. Our calculations reveal that the binding and activation energies on a strained Ge(001) surface increase and decrease, respectively, by 0.21 and 0.12 eV per percent compressive strain. For a growth temperature of 600°C, these strain-dependencies give rise to a 16-fold increase in adatom density and a fivefold decrease in adatom diffusivity in the region of compressive strain surrounding a Ge island with a characteristic size of 10 nm.

  • Received 31 October 2002

DOI:https://doi.org/10.1103/PhysRevB.67.041308

©2003 American Physical Society

Authors & Affiliations

A. van de Walle*, M. Asta, and P. W. Voorhees

  • Materials Science & Engineering Department, Northwestern University, Evanston, Illinois 60208-3108

  • *Email address: avdw@alum.mit.edu; http://www.mit.edu/∼avdw/

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Vol. 67, Iss. 4 — 15 January 2003

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