Abstract
The electronic and geometric structure of a recently proposed oxygen-related defect in silicon is studied using a precise Iab initioP quantum-molecular-dynamics method based on local-density-functional theory, nonlocal pseudopotentials, and the supercell approximation. This defect is a metastable configuration of interstitial oxygen in Si (Si:), and it is closely related to a vacancy-interstitial pair. This defect has a relatively low formation energy despite the presence of a silicon broken bond. A simple and straightforward procedure is used to identify the static barrier for the formation of an intimate vacancy-interstitial pair in silicon and the static barrier for the recombination of the broken bond in metastable Si:. The similarities in geometric configurations for both cases are explored to introduce a mechanism for the creation of intimate vacancy-interstitial-like defects in silicon.
- Received 14 August 1991
DOI:https://doi.org/10.1103/PhysRevB.45.3304
©1992 American Physical Society