Passivation of dangling bonds in amorphous Si and Ge by gas adsorption

R. Tsu, D. Martin, J. Gonzalez-Hernandez, and S. R. Ovshinsky
Phys. Rev. B 35, 2385 – Published 15 February 1987
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Abstract

Amorphous Si and Ge films, prepared by molecular-beam deposition under ultrahigh vacuum at relatively low temperature, absorb gases such as H2, F2, O2, SiF4, GeF4, etc. Because of the high reactivity of the dangling bonds present, these molecules are broken down to their atomic constituents, thereby passivating the dangling bonds and producing chemisorption. It is highly significant that the dangling bonds on internal surfaces of microvoids in amorphous silicon can break down molecular hydrogen while on a cleaved c-Si surface they cannot. Posthydrogenation of amorphous germanium in ultrahigh vacuum with a low-energy differentially pumped sputtering gun resulted in a-Ge:H having a photoconductivity at room temperature, under an Air Mass 1 light, almost double the dark conductivity.

  • Received 28 August 1986

DOI:https://doi.org/10.1103/PhysRevB.35.2385

©1987 American Physical Society

Authors & Affiliations

R. Tsu, D. Martin, J. Gonzalez-Hernandez, and S. R. Ovshinsky

  • Energy Conversion Devices, Inc., 1675 West Maple Road, Troy, Michigan 48084

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Issue

Vol. 35, Iss. 5 — 15 February 1987

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