Theory of the electronic structure of the Si-SiO2 interface

R. B. Laughlin, J. D. Joannopoulos, and D. J. Chadi
Phys. Rev. B 21, 5733 – Published 15 June 1980
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Abstract

A theory of the Si-SiO2 interface based on recent experimental findings for silicon surfaces and their oxidation is presented. It is proposed that a simple local-orbital picture can simultaneously describe silicon, its oxidation, and the Si-SiO2 interface and that two dimensionality is not essential to physically meaningful calculations of interface local densities of states. Calculations are performed which show that interface states do not arise simply from the presence of a boundary. It is argued that band tailing at the interface, like that in amorphous silicon, is due primarily to strain rather than to charged centers, and that dangling bonds at the interface should give rise to an inhomogeneously broadened discrete level at midgap.

  • Received 31 October 1979

DOI:https://doi.org/10.1103/PhysRevB.21.5733

©1980 American Physical Society

Authors & Affiliations

R. B. Laughlin and J. D. Joannopoulos

  • Department of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

D. J. Chadi

  • Xerox Palo Alto Research Center, Palo Alto, California 94304

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Issue

Vol. 21, Iss. 12 — 15 June 1980

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